Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1998-09-18
2000-06-27
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
356318, 356372, 356381, 356382, G01J 330
Patent
active
06081330&
ABSTRACT:
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
REFERENCES:
patent: 5812261 (1998-09-01), Nelson et al.
Banet Matthew J.
Fuchs Martin
Hanselman John
Nelson Keith A.
Rogers John A.
Active Impulse Systems Inc.
Font Frank G.
Ratliff Reginald A.
Renfrew Dwight
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