Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1997-01-15
1998-09-22
Nelms, David C.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
356376, 356371, G01J 330
Patent
active
058122613
ABSTRACT:
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
REFERENCES:
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4728165 (1988-03-01), Powell et al.
Banet Matthew J.
Fuchs Martin
Hanselman John
Nelson Keith A.
Rogers John A.
Active Impulse Systems Inc.
Nelms David C.
Ratliff Reginald A.
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