Method and device for measuring the thickness of opaque and tran

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

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356376, 356371, G01J 330

Patent

active

058122613

ABSTRACT:
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.

REFERENCES:
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4728165 (1988-03-01), Powell et al.

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