Method and device for measuring temperature radiation using a py

Details Method and device for measuring temperature radiation using a py Method and device for measuring temperature radiation using a py

1992-10-06

1993-12-14

Cuchlinski, Jr., William A.

Electric resistance heating devices

Heating devices

Radiant heater

374123, 374126, 374161, 356 43, 219411, A21B 200, F26B 1900, G01J 500, G01J 510

Patent

active

052710840

ABSTRACT:
Method and apparatus for measuring the radiation originating from one side of a wafer of semiconductor material using a pyrometer, wherein non-blackbody compensation radiation is projected onto that side to compensate for the reflectivity of the wafer of material and wherein the intensity of the non-blackbody compensation radiation is controlled subject to the amount of radiation measured by the pyrometer.

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