Electricity: measuring and testing – A material property using electrostatic phenomenon
Reexamination Certificate
2007-07-03
2007-07-03
Hirshfeld, Andrew H. (Department: 2858)
Electricity: measuring and testing
A material property using electrostatic phenomenon
C324S456000, C399S048000
Reexamination Certificate
active
11001048
ABSTRACT:
In a surface potential distribution measurement method and device, a sample having a surface with a surface potential distribution is scanned using a charged particle beam in a two-dimensional manner. A detection signal caused by the two-dimensional scanning is obtained to measure the surface potential distribution. Charged particles, other than charged particles of the charged particle beam incident to the sample surface by the two-dimensional scanning, with which components of an incidence velocity vector of the charged particles in a direction perpendicular to the sample surface are reversed, are detected so that a detection signal indicating an intensity according to the detected charged particles is obtained in correspondence with a position on the sample surface.
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He Amy
Hirshfeld Andrew H.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Ricoh & Company, Ltd.
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