Data processing: measuring – calibrating – or testing – Measurement system – Article count or size distribution
Reexamination Certificate
2006-05-09
2006-05-09
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Article count or size distribution
C073S865500
Reexamination Certificate
active
07043394
ABSTRACT:
A novel measuring method which allows measurement of fine particles which are extremely fine and contained in a very small amount in ultrapure water is provided. The number frequency with respect to the fine particles having a particle diameter of 0.1 μm or more is measured based on the finding that the fine particles contained in the ultrapure water at the use point of an ultrapure water production system exhibits a logarithmic normal distribution to determine the logarithmic normal distribution of the fine particles contained in the ultrapure water, and the number of the fine particles having a particle diameter of less than those of the measured particles contained in the ultrapure water is obtained from the distribution.
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Endou Mutsuko
Hirose Takazou
Inagaki Seiichi
Kousaka Yasuo
Yanagi Motonori
Barlow John
Kundu Sujoy
Nomura Micro Science Co., Ltd.
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