Method and device for manufacturing a thin film and magnetic rec

Details Method and device for manufacturing a thin film and magnetic rec Method and device for manufacturing a thin film and magnetic rec

1998-01-07

1999-10-05

Resan, Stevan A.

Coating processes

Magnetic base or coating

Magnetic coating

427132, 427585, 42725519, 2041922, C23C 400

Patent

active

059620668

ABSTRACT:
A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.

REFERENCES:
patent: 4855175 (1989-08-01), Wakai et al.
patent: 5073449 (1991-12-01), Niimi et al.
patent: 5418059 (1995-05-01), Sugita et al.

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