Method and device for laser drilling organic materials

Details Method and device for laser drilling organic materials Method and device for laser drilling organic materials

2005-03-01

2005-03-01

Vinh, Lan (Department: 1765)

Etching a substrate: processes

Nongaseous phase etching of substrate

Etching using radiation

C216S062000, C216S065000, C216S066000

Reexamination Certificate

active

06861008

ABSTRACT:
For the laser drilling of organic materials, in particular for making blind holes in dielectric layers, a frequency-doubled Nd-vanadate laser with the following parameters is used:pulse width<40nspulse frequency≧20kHzwavelength=532nm.

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