Method and device for inspection active matrix substrate

Details Method and device for inspection active matrix substrate Method and device for inspection active matrix substrate

2005-01-25

2005-01-25

Pert, Evan (Department: 2829)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S1540PB

Reexamination Certificate

active

06847223

ABSTRACT:
An active matrix substrate has a plurality of pixel drive cells, each of which includes a switching element and a capacitor. The capacitor is charged and discharged through the switching element, and a charging current based on a charge stored in the capacitor and a discharge current after discharging the capacitor are sampled. The charging current is sampled at a plurality of points on a time axis in consideration of the variation of the on-resistance of the switching element. Since the load on a path through which an inspection current (charging current or discharge current) flows depends on the position of the pixel drive cells, the wave height value between the charging current and the discharge current is calculated for each pixel drive cell based on the discharge current, and whether or not the pixel drive cell has a defect is determined based on the wave height value.

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