Method and device for in situ layer thickness determination

Details Method and device for in situ layer thickness determination Method and device for in situ layer thickness determination

2005-08-30

2005-08-30

Meeks, Timothy (Department: 1762)

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

C427S250000, C427S237000, C427S248100

Reexamination Certificate

active

06936299

ABSTRACT:
A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness which has been reached. As such, this property can be measured.

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patent: 5057781 (1991-10-01), Atkins et al.
patent: 5142228 (1992-08-01), Kingsbury
patent: 5466638 (1995-11-01), Eguchi
patent: 6436246 (2002-08-01), Sandhu
patent: 05215290 (1993-08-01), None

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