Method and device for high-speed interferential microscopic...

Details Method and device for high-speed interferential microscopic... Method and device for high-speed interferential microscopic...

2005-09-06

2005-09-06

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S512000

Reexamination Certificate

active

06940602

ABSTRACT:
A method and a device for interferential microscopic imaging of an object which comprises sending a light beam in each of the arms of a two-wave interferometer, one of the arms comprising the object to be analyzed. The phase is subjected to a sinusoidal modulation to a frequency f. The signal modulation results from mechanical oscillation of an assembly of elements of the interferometer. The interference signal (S) is integrated during the phase variation via a multichannel sensor. A computer enables to record the integrated interference signal obtained during each period fraction 1
and to calculate, subsequently, the image of the object. The invention is potentially useful for characterizing thin layers, for controlling components in microelectronics, for reading data stored in volume (3D) and objects unstable in time; in biology and in vivo studies.

REFERENCES:
patent: 4818110 (1989-04-01), Davidson
patent: 5194918 (1993-03-01), Kino et al.
patent: 6775006 (2004-08-01), Groot et al.
patent: 2 664 048 (1992-01-01), None

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