Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1997-02-21
1999-04-20
Walberg, Teresa
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
118 501, 118724, 118719, 219409, 392411, 392412, 392418, 427557, 438466, 438799, C30B 2508, C30B 2510, H05B 366, F27B 109
Patent
active
058955941
ABSTRACT:
A method and device for heating silicon carrier bodies in a deposition reactor are by means of radiated heat. In this method, the carrier bodies are irradiated by means of a heat radiation device which emits radiation having a color temperature of at least 2000.degree. C.
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Pelham J.
Wacker - Chemie GmbH
Walberg Teresa
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