Method and device for heating carrier bodies

Details Method and device for heating carrier bodies Method and device for heating carrier bodies

1997-02-21

1999-04-20

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

118 501, 118724, 118719, 219409, 392411, 392412, 392418, 427557, 438466, 438799, C30B 2508, C30B 2510, H05B 366, F27B 109

Patent

active

058955941

ABSTRACT:
A method and device for heating silicon carrier bodies in a deposition reactor are by means of radiated heat. In this method, the carrier bodies are irradiated by means of a heat radiation device which emits radiation having a color temperature of at least 2000.degree. C.

REFERENCES:
patent: 3240915 (1966-03-01), Carter et al.
patent: 3761678 (1973-09-01), Eckles
patent: 4147814 (1979-04-01), Yatsurugi et al.
patent: 4173944 (1979-11-01), Koppl et al.
patent: 4179530 (1979-12-01), Koppl et al.
patent: 4311545 (1982-01-01), Bugl et al.
patent: 4503807 (1985-03-01), Nakayama et al.
patent: 4805556 (1989-02-01), Hagan et al.
patent: 5169478 (1992-12-01), Miyamoto et al.
patent: 5382419 (1995-01-01), Nagai et al.
patent: 5478396 (1995-12-01), Keck et al.
patent: 5482557 (1996-01-01), Kanai et al.

Affiliated with

Also associated with

Rating

Method and device for heating carrier bodies does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for heating carrier bodies, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for heating carrier bodies will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2246096