Method and device for determining projection lens pupil...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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C355S053000

Reexamination Certificate

active

06977717

ABSTRACT:
A method and device for determining projection lens pupil transmission distribution in a photolithographic imaging system, the device including an illumination source; a transmissive reticle; an aperture layer having an illumination source side and a light emission side and comprising a plurality of openings therethrough; a diffuser mounted on the illumination source side of the aperture layer; a projection lens system; and an image plane, in which a pupil image corresponding to each of the plurality of openings in the aperture layer is formed at the image plane when radiation from the illumination source passes through the reticle, the diffuser, the aperture layer and the projection lens system, the pupil image having a projection lens pupil transmission distribution.

REFERENCES:
patent: 4000949 (1977-01-01), Watkins
patent: 5153989 (1992-10-01), Kondo et al.
patent: 5300967 (1994-04-01), Kamon
patent: 5396311 (1995-03-01), Fukushima et al.
patent: 5420417 (1995-05-01), Shiraishi
patent: 5461456 (1995-10-01), Michaloski
patent: 5973771 (1999-10-01), Hibbs et al.
patent: 2003/0043356 (2003-03-01), Shiraishi
patent: 2003/0091913 (2003-05-01), Shiode
patent: 2003/0099034 (2003-05-01), Mann et al.
patent: 2004/0218262 (2004-11-01), Chuang et al.
Tichenor et al.; “System Integration and Performance of the EUV Engineering Test Stand”; Workshop on Extreme Ultraviolet Lithography; Oct. 17-19, 2000.

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