Method and device for detecting arcs

Details Method and device for detecting arcs Method and device for detecting arcs

2006-12-19

2009-12-29

Cosimano, Edward R (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

C324S510000, C361S001000, C361S002000, C361S035000, C361S042000, C361S062000, C361S065000, C361S078000, C361S079000, C700S292000, C700S293000, C702S057000, C702S187000, C702S188000, C702S189000

Reexamination Certificate

active

07640120

ABSTRACT:
An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.

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