Method and device for delivering a pure gas charged with a prede

Details Method and device for delivering a pure gas charged with a prede Method and device for delivering a pure gas charged with a prede

1996-11-19

1999-08-17

Ferensic, Denise L.

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

137605, 137606, 137872, 137863, 1375991, 137599, 251331, 73 106, F17D 104

Patent

active

059378867

ABSTRACT:
A method of delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus, comprising the steps of mixing at least two different auxiliary gases, including the impurity to form a mixture, diluting a sampled quantity of the mixture in the pure gas in a predetermined manner, delivering the pure gas charged with the impurity to the apparatus, wherein the auxiliary gases are stored in a reservoir in the form of a mixture of known composition, most of the auxiliary gases in the mixture having volume concentrations substantially of the same order of magnitude.

REFERENCES:
patent: 4977929 (1990-12-01), Chinnock
patent: 5157957 (1992-10-01), Mettes
patent: 5239856 (1993-08-01), Mettes
patent: 5261452 (1993-11-01), McAndrew
patent: 5497652 (1996-03-01), Ohmi
patent: 5509292 (1996-04-01), D'Appollonia
patent: 5518015 (1996-05-01), Berget
patent: 5587519 (1996-12-01), Ronge
patent: 5635620 (1997-06-01), Ronge
patent: 5661225 (1997-08-01), Ridgeway

Affiliated with

Also associated with

Rating

Method and device for delivering a pure gas charged with a prede does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for delivering a pure gas charged with a prede, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for delivering a pure gas charged with a prede will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-305144