Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-01-25
2005-01-25
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C359S509000
Reexamination Certificate
active
06847431
ABSTRACT:
An optical assembly (222) for directing and/or focusing a beam of light energy for an exposure apparatus (10) includes an optical housing (240) and one or more optical elements (242) that cooperate to form an optical cavity (270) having one or more stagnant flow areas (272). The optical assembly (222) also includes one or more flow diverters (246) for improving the flow a replacement fluid (250) in the stagnant flow areas (272) of the optical cavity (270) during purging of the optical assembly (222) with the replacement fluid (250).
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Coon Derek
Fay Bernard
Nikon Corporation
Roeder Steven G.
Rose Jim
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