Method and device for continuously measuring silicon island...

Details Method and device for continuously measuring silicon island... Method and device for continuously measuring silicon island...

2008-08-25

2009-08-11

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

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Reexamination Certificate

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07573587

ABSTRACT:
A method of continuously measuring an elevation and shape of an unmelted polycrystalline silicon island during a silicon meltdown process. The method comprises projecting a focused bright light on the silicon island to produce a bright dot on the silicon island. The method also includes electronically determining an elevation and a shape of the silicon island by tracking the bright dot during the meltdown process.

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