Gas separation – Combined or convertible
Patent
1998-11-18
2000-07-25
Simmons, David A.
Gas separation
Combined or convertible
55323, 55329, 55392, 55429, 96400, 96421, B01D 3315, B01D 4612
Patent
active
060932287
ABSTRACT:
A method and a device for collecting by-products individually, applied to the semiconductor manufacture factory, is disclosed. The device, adapted to be used to filter a fluid accompanied with an object, for retaining the object therein includes a body, an entrance provided on an upper portion of the body for enabling the fluid to flow into the body, a powder trap mounted in the body for filtering the fluid to retain the object therein, a guiding device mounted in the body for guiding the fluid to pass the powder trap, and an exit provided on a lower portion of the body for enabling the filtered fluid to flow out. The advantages of the present invention have: (a) preventing the by-products from being reacted with each other resulting in a fire; (b) preventing the low vacuum tube from being chocked by by-products; and (c) collecting the by-products individually.
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Pham Minh-Chau T.
Simmons David A.
Whitesel J. Warren
Winbond Electronics Corp.
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