Method and device for carrying out emission spectrometry

Details Method and device for carrying out emission spectrometry Method and device for carrying out emission spectrometry

2008-05-13

2008-05-13

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C356S316000, C356S317000

Reexamination Certificate

active

10520123

ABSTRACT:
The invention relates to a method and a device for carrying out emission spectroscopy, in particular laser emission spectroscopy. According to said method, a pulsed laser beam is automatically focussed on a workpiece to generate a laser-induced plasma, the radiation emitted from the plasma is detected and an elemental analysis is performed using the captured radiation spectrum. The invention is characterised in that a laser beam impingement is carried out with a variable pulse interval ΔT, that prior to the plasma generation, additional geometric parameters P1, P2 . . . PN of a potential measurement location on the workpiece surface, in addition to the distance d of the autofocus lens from said workpiece surface are determined and in that an elemental analysis is only performed for the potential measurement locations, at which at least one of the additional geometric parameters lies within a predefined tolerance range [T1 . . . T2].

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Stepputat M et al., “High-Speed Detection of Additives in Technical Polymers with Laser-Induced Breakdown Spectrometry”, Bd. 1667, 2002, Seiten 35-40, XP001155758 Frankfurt, Feb. 26-27, 2002.

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