Method and device for calibration sensors

Details Method and device for calibration sensors Method and device for calibration sensors

2007-10-16

2007-10-16

Raevis, Robert (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Gas or liquid analyzer

Reexamination Certificate

active

11195467

ABSTRACT:
A method and device are disclosed for calibrating sensors, which sensors are arranged on semiconductor chips and are e.g. to be used for detecting a substance in a fluid. The sensors are calibrated while they are still assembled on a semiconductor wafer by exposing the wafer to a calibration fluid containing a known amount of the substance to be measured. Hence, rather than first cutting the wafer, the sensors are calibrated at an early stage. For this purpose, they are placed on a chuck below a lid. The calibration fluid with known parameters is introduced between the wafer and the lid. This allows to test and calibrate a large number of sensors quickly.

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