Method and device for automatic optimal location of an...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S028000, C700S095000

Reexamination Certificate

active

06970759

ABSTRACT:
A process and installation for automatic optimal location of a servicing operation on an integrated circuit. The accessible polygons are retrieved on the basis of topographic descriptive data and data representing the electrical circuit. For each step, different execution options are determined, each corresponding to each of the different accessible polygons, and a rating is calculated and assigned to each execution option as a function of the depth of each possible initial polygon with respect to the access surface, and of accessibility parameters of each possible initial polygon, and the optimal execution option to be used for executing each step of the servicing operation is determined automatically by a numerical optimization calculation using the ratings assigned to the different execution options of each step of the servicing operation.

REFERENCES:
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patent: 5392222 (1995-02-01), Noble
patent: 5675499 (1997-10-01), Lee et al.
patent: 6751519 (2004-06-01), Satya et al.
Kunich C et al.: “LayDis-and Advanced Navigation System for Electron Beam Probing”, Microelectronic Engineering, NL, Elsevier Publisher BV., Amsterdam, vol. 31, No. 1, Feb. 1, 1996, pp. 355-362, XP004006647 ISSN: 0167-9317.

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