Method and device for analyzing the surface of a substrate

Details Method and device for analyzing the surface of a substrate Method and device for analyzing the surface of a substrate

2001-11-21

2008-09-30

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

Triangulation

Reexamination Certificate

active

07430049

ABSTRACT:
A process for scanning a surface of a substrate, which process takes at least one reflected image of at least one test pattern on the surface and extracts by digital processing local phases in two directions. Variations in local slopes are calculated by digital processing from the local phases to deduce therefrom variations in curvature or variations in altitude of the surface.

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