Method and device for alignment of a substrate

Details Method and device for alignment of a substrate Method and device for alignment of a substrate

2007-12-11

2007-12-11

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

10960786

ABSTRACT:
Embodiments of the invention include a method of placing a substrate on a support. In an embodiment of the invention, the method includes determining a position of the substrate relative to a reference position via a sensor which outputs a sensor signal to a control unit, the determining including detecting the position of the substrate in a chamber, and determining a gripping position on the substrate; gripping the substrate at the gripping position with a gripper controlled by the control unit, and providing the substrate in a defined position on the support member, the providing including moving the substrate to a fixed position relative to the support member such that the center of the substrate arrives at a predetermined position on the support member.

REFERENCES:
patent: 5990650 (1999-11-01), Brock
patent: 6188467 (2001-02-01), Yamatsu et al.
patent: 6813543 (2004-11-01), Aalund et al.
patent: 2002/0074635 (2002-06-01), Hattori et al.
patent: 1 047 114 (2000-10-01), None

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