Method and device for aligning a charged particle beam column

Details Method and device for aligning a charged particle beam column Method and device for aligning a charged particle beam column

2008-06-10

2008-06-10

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S310000

Reexamination Certificate

active

07385205

ABSTRACT:
The invention provides a method and apparatus for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.

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