Method and controlling system for preventing the scratching of w

Details Method and controlling system for preventing the scratching of w Method and controlling system for preventing the scratching of w

1997-12-16

2000-08-01

Gordon, Paul P.

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700104, 700108, 700110, 700112, 700213, 700214, 414243, 414270, 414729, 414739, G06F 1900

Patent

active

060979925

ABSTRACT:
A method for avoiding scratching of wafer backs being held by a vacuum to a fetch arm of a stepper machine for insertion into a cassette holder includes releasing the vacuum in the suction head of the fetch are before the wafer enters the cassette holder. The release of vacuum reduces frictional force between the wafer back and the suction head when the wafer accidentally hits the side of the cassette holder. Therefore, the vacuum release method avoids scratching of wafer backs by the suction head of the fetch arm. The invention requires a separate vacuum release controller to release the vacuum in the suction head for a prescribed delaying period after the fetch arm starts moving toward the cassette holder.

REFERENCES:
patent: 4634331 (1987-01-01), Hertel
patent: 4770590 (1988-09-01), Hugues et al.
patent: 5171393 (1992-12-01), Moffat
patent: 5295777 (1994-03-01), Hodos
patent: 5359785 (1994-11-01), Fukutomi et al.
patent: 5380682 (1995-01-01), Edwards et al.
patent: 5399531 (1995-03-01), Wu
patent: 5486080 (1996-01-01), Sieradzki
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5540098 (1996-07-01), Ohsawa

Affiliated with

Also associated with

Rating

Method and controlling system for preventing the scratching of w does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and controlling system for preventing the scratching of w, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and controlling system for preventing the scratching of w will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-672978