Method and circuitry for calibrating a micromachined sensor

Details Method and circuitry for calibrating a micromachined sensor Method and circuitry for calibrating a micromachined sensor

1995-06-07

1997-04-15

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Speed, velocity, or acceleration

G01L 114

Patent

active

056211570

ABSTRACT:
To calibrate an accelerometer having a ground plane, two fixed beams, and a movable beam centered between the fixed beams, a force/acceleration reference is produced by providing a change in voltage on the ground plane. Circuit gain is adjusted so that the output response indicates the force reference. The calibration method can be used to self-calibrate in response to an event, such as a power-up state. The calibration can be performed without shaking and can be used with either open or closed loop circuits.

REFERENCES:
patent: 5253510 (1993-10-01), Allen et al.
patent: 5287724 (1994-02-01), White et al.
patent: 5314572 (1994-05-01), Core et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5347841 (1994-09-01), Enzinna
patent: 5391283 (1995-02-01), Shimada et al.

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