Electricity: measuring and testing – Using ionization effects – For monitoring pressure
Patent
1988-08-29
1990-10-30
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Using ionization effects
For monitoring pressure
324464, 324459, G01L 2134, G01L 2130
Patent
active
049671570
ABSTRACT:
A method and circuit for measuring the pressure of a gas with a cold cathode ionization gauge by measuring the electrical resistance or conductance of the gauge to thus extend the measurement range of the gauge. Current into the gauge may be limited to a substantially constant value at pressures greater than about 10.sup.-6 Torr, for example, so that the gauge voltage varies monotonically with respect to pressure at pressures greater than 10.sup.-6 Torr.
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Eisenzopf Reinhard J.
Harvey Jack B.
MKS Instruments Inc.
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