Method and circuit for detecting movements through...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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Reexamination Certificate

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06856144

ABSTRACT:
Method for detecting movements through a micro-electric-mechanical sensor, having a fixed body and a moving mass, forming at least one first and one second detection capacitor, connected to a common node and to a first, respectively a second detection node and having a common detection capacitance at rest and a capacitive unbalance in case of a movement. The method includes the steps of: feeding the common node with a constant detection voltage of predetermined duration; generating a feedback voltage to maintain the first and the second detection node at a constant common mode voltage; generating a compensation electric quantity, inversely proportional to the common detection capacitance at least in one predetermined range; supplying the compensating electric quantity to the common node; and detecting an output quantity related to the capacitive unbalance.

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patent: 2 706 038 (1994-12-01), None
Lemkin, M. et al., “A Three-Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset-Trim Electronics,”IEEE Journal of Solid-State Circuits, 34(4):456-468, Apr. 1999.

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