Measuring and testing – Inspecting
Reexamination Certificate
2006-04-18
2006-04-18
Raevis, Robert (Department: 2856)
Measuring and testing
Inspecting
Reexamination Certificate
active
07028565
ABSTRACT:
The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).
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Bernhardt Frank
Birkner Andreas
Hiltawski Knut
Leica Microsystems Jena GmbH
Raevis Robert
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