Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-07-31
2007-07-31
Vanore, David A. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S119000
Reexamination Certificate
active
11045779
ABSTRACT:
The invention is directed to a method and an arrangement for the plasma-based generation of intensive short-wavelength radiation, particularly EUV radiation. The object of the invention, to find a novel possibility for plasma-based generation of intensive soft x-radiation, particularly EUV radiation, which permits efficient energy conversion in the desired spectral band with high repetition frequency (several kHz) of the plasma excitation, minimized emission of debris and low erosion of the nozzle of the target generator, is met according to the invention in that an additional energy beam is directed on the target flow spatially in advance of its interaction with the high-energy beam, the target flow being acted upon by this additional energy beam with substantially weaker energy pulses compared to the high-energy beam in order to divide the target flow into a first portion and at least one second portion, wherein the target flow is excited at an interaction point within the second portion by the high-energy beam for generating a hot, radiating plasma, and the second portion is decoupled from the first portion and therefore from the target generator in such a way that a hydrodynamic disturbance generated in the second portion by the pulse of the high-energy beam is transmitted into the first portion only negligibly.
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Gaebel Kai
Hergenhan Guido
Ziener Christian
Reed Smith LLP
Vanore David A.
Xtreme technologies GmbH
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