Coherent light generators – Particular beam control device – Control of pulse characteristics
Reexamination Certificate
2011-07-05
2011-07-05
Van Roy, Tod T (Department: 2828)
Coherent light generators
Particular beam control device
Control of pulse characteristics
C372S026000, C372S028000
Reexamination Certificate
active
07974321
ABSTRACT:
The invention is directed to a method and an arrangement for stabilizing the average emitted radiation output of a pulsed radiation source. It is the object of the invention to find a novel possibility for stabilizing the average emitted radiation output of a pulsed radiation source which enables a reliable regulation even when there is no sufficiently reliable manipulated variable for influencing the emitted pulse energy (Ei). According to the invention, this object is met in that the individual pulse energy (Ei) of the current radiation pulse is measured, the deviation of the current individual pulse energy (Ei) from a previously determined target value (E0) is determined, and the pulse interval (Δti+1) preceding the triggering of the next radiation pulse is controlled depending on the magnitude of the deviation between the current individual pulse energy (Ei) and the target value (E0) of the pulse energy.
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Brudermann Jesko
Kleinschmidt Juergen
Frommer & Lawrence & Haug LLP
Roy Tod T Van
XTREME technologies GmbH
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