Method and arrangement for producing radiation

Details Method and arrangement for producing radiation Method and arrangement for producing radiation

2007-07-03

2007-07-03

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Source

C250S50400H

Reexamination Certificate

active

10513403

ABSTRACT:
A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.

REFERENCES:
patent: 4723262 (1988-02-01), Noda et al.
patent: 5003543 (1991-03-01), Morsell et al.
patent: 5089711 (1992-02-01), Morsell et al.
patent: 5175757 (1992-12-01), Augustoni et al.
patent: 5606588 (1997-02-01), Umstadter et al.
patent: 5637962 (1997-06-01), Prono et al.
patent: 5991360 (1999-11-01), Matsui et al.
patent: 6002744 (1999-12-01), Hertz et al.
patent: 6324256 (2001-11-01), McGregor et al.
patent: 2002/0141537 (2002-10-01), Mochizuki
patent: WO 02/32197 (2002-04-01), None
Rymell and Hertz, “Droplet Target for Low-Debris Laser-Plasma Soft X-Ray Generation”, Optics Communications 103 (1993), pp. 105 to 110.
Foster et al., “Apparatus for Producing Uniform Solid Spheres of Hydrogen”, Rev. Sci. Instrum., vol. 48, No. 6, (1977), pp. 625 to 631.
Berglund et al., “Cryogenic Liquid-Jet Target for Debris-Free Laser-Plasma Soft X-Ray Generation”, Rev. Sci. Instrum., vol. 69, No. 6, (1998), pp. 2361 to 2364.
Rymell et al., “Liquid-Jet Target Laser-Plasma Sources for EUV and X-Ray Lithography”, Microelectronic Engineering 46 (1999), pp. 453 to 455.
Berglund et al., “Ultraviolet Prepulse for Enhanced X-Ray Emission and Brightness from Droplet-Target Laser Plasmas”, Appl. Phys. Lett. 69 (12), 1996, pp. 1683 to 1685.
Magnus Berglund et al., “Ultraviolet Prepulse for Enhanced X-Ray Emission and Brightness from Droplet-Target Laser Plasmas”, Applied Physics Letters, American Institute of Physics, New York, U.S., vol. 69, No. 12, Sep. 16, 1996, pp. 1683-1685.

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