Method and arrangement for optical distance measurement

Details Method and arrangement for optical distance measurement Method and arrangement for optical distance measurement

1985-01-24

1986-03-25

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, G01B 902

Patent

active

045779686

ABSTRACT:
A method and apparatus is described for making absolute and relative distance measurements optically. A grating, or gratings, is located on the object whose displacement is to be measured, or on a surface in contact with the object. Two perpendicularly polarized light beams interact with the grating to produce a phase difference therebetween. This phase difference is a measure of the displacement of the object, and can be compensated for in order to determine the exact displacement of the object. The relative displacement between two objects can be measured in a similar way, there being gratings on the two objects. One of the light beams strikes one grating while the other strikes the second grating. If there is perfect alignment between the gratings on the two objects, there will be no phase difference in the diffracted light from the gratings. If there is misalignment between the objects, a phase difference between the diffracted signals will be produced indicative of this misalignment.

REFERENCES:
patent: 3756723 (1973-09-01), Hock
patent: 3849003 (1974-11-01), Velzel
patent: 3891321 (1975-06-01), Hock
patent: 4172664 (1979-10-01), Charsky et al.
patent: 4298283 (1981-11-01), Makosch et al.

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