Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-04-21
1996-10-22
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356353, 356354, G01B 902
Patent
active
055682561
ABSTRACT:
A method and apparatus for topographic surface analysis including at least ne light source for radiating light, a first light-distributing surface of a first diffraction grating for receiving light from the at least one light source and for reflecting a first bundle of light under normal optical conditions and a second bundle of light formed by diffraction of the first order. A first optical stage is provided for projecting the first and second bundles from the first light-distributing surface in an optically conjugated form onto an object surface to be analyzed of a sample. Light representing the object surface is sharply projected via the first optical stage onto a second light-distributing surface of a second diffraction grating. A second optical stage projects diffracted bundles of light from the second light-distributing surface onto a detector which detects radiation and enables topographic analysis of the object surface.
Holger Fritz
Korner Klaus
Nyarsik Lajos
Spur Gunter
Uhlmann Eckart
Fraunhofer Gesellschaft zur Forderung der angewandten Forschung
Turner Samuel A.
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