Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Controlling current distribution within bath
Patent
1996-10-16
1998-07-07
Gorgos, Kathryn L.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Controlling current distribution within bath
204228, 204227, 204DIG7, C25D 500, C25D 1710
Patent
active
057763275
ABSTRACT:
A method and apparatus are provided for electroplating a workpiece. The apparatus includes an anode basket containing particles of an electroplating material. A mask is positioned around the anode basket to selectively block current flow from the basket to the workpiece which is mounted to a cathode. The mask includes a frame supporting a number of non-conductive plates adjusted in position to provide a desired electrical field distribution. The resulting electrical field between the anode and the cathode produces uniform plating thickness over the entire surface of the workpiece.
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F.A. Lowenheim, Electroplating, McGraw-Hill Book Co., New York, 1978, pp. 152-155, 329-330. No month avaliable.
Botts Robert R.
Joshi Swati V.
Nicholls Louis W.
Gorgos Kathryn L.
Leader William T.
Mitsubishi Semiconuctor Americe, Inc.
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