Method and apparatus to reconcile recipe manager and...

Details Method and apparatus to reconcile recipe manager and... Method and apparatus to reconcile recipe manager and...

2007-10-09

2007-10-09

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000

Reexamination Certificate

active

11001483

ABSTRACT:
A method and apparatus for managing recipes in a semiconductor manufacturing process. Recipes and associated process contexts in a manufacturing execution system and corresponding recipes and associated contexts in a recipe management system are audited to identify discrepancies. The discrepancies are reconciled to ensure that compatible recipes and process contexts are maintained in the manufacturing execution system and the recipe management system. The audit and reconciliation process can be initiated automatically at predetermined time intervals or can be initiated interactively by a user of the manufacturing system.

REFERENCES:
patent: 6035293 (2000-03-01), Lantz et al.
patent: 6430572 (2002-08-01), Steffan et al.
patent: 6735493 (2004-05-01), Chou et al.
patent: 6748288 (2004-06-01), Su et al.
patent: 2005/0228765 (2005-10-01), Huang et al.
PR Newswire “New KLA-Tencor Web based Recipe Management Service Enables Increased Productivity and Lower Cost of Ownership” Jun. 2001, p. 1.

Affiliated with

Also associated with

Rating

Method and apparatus to reconcile recipe manager and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus to reconcile recipe manager and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus to reconcile recipe manager and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3901104