Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate
2007-07-03
2007-07-03
Nguyen, Dung Van (Department: 3723)
Abrading
Abrading process
Utilizing fluent abradant
C451S037000, C451S910000
Reexamination Certificate
active
10861793
ABSTRACT:
A variety of techniques may be employed, alone or in combination, to enhance contact between a processed substrate and applied megasonic energy. In accordance with one embodiment of the new invention, the vibration plate is brought into intimate contact with one surface of the substrate, while cleaning or processing fluid contacts the other. In accordance with an alternative embodiment of the present invention, a reflecting surface may be provided to cause emanated energy to be reflected back into the near field and make it more uniform. In accordance with another alternative embodiment of the present invention, energy may be transferred across a substrate bounded on both sides by liquid with incidence of megasonic energy that is either normal to the substrate surface or within a critical range of incident angles. In yet another embodiment, generated dilatational waves may be converted to surface waves prior to contacting the substrate.
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Busnaina Ahmed A.
Maraviov Sharyl L.
Miranda Henry R.
Montierth Garry L.
Nguyen Dung Van
P.C.T. Systems, Inc.
Townsend and Townsend / and Crew LLP
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