Method and apparatus to eliminate galvanic corrosion on...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Wire contact – lead – or bond

Reexamination Certificate

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C257S741000

Reexamination Certificate

active

06989608

ABSTRACT:
The present invention is an electronic interconnect comprising a bond pad consisting essentially of aluminum and copper and configured for use in semiconductor electronic devices to couple a bond wire to an integrated circuit package. The bond pad has an oxide coating residing on at least a topmost surface of the bond pad. The oxide coating consists essentially of aluminum, copper, and oxygen. Therefore, the bond pad has little, if any, naturally occurring corrosion products such as hydrated aluminum hydroxide (Al(OH)3) and/or Al2Cu particles. Al(OH)3films and Al2Cu particles have been shown to form on aluminum copper bond pads, preventing effective wire-bonding.

REFERENCES:
patent: 4478915 (1984-10-01), Poss et al.
patent: 5243222 (1993-09-01), Harper et al.
patent: 5898226 (1999-04-01), Jeong et al.
patent: 6794248 (2004-09-01), Hashimoto et al.
patent: 2002/0081776 (2002-06-01), Tellkamp
S. Thomas et al., “Micro-Corrosion of Al-Cu Bonding Pads”, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Jun. 1987, vol. CHMT-10, No. 2, pp. 252-257.
Printout: Galvanic Voids, Semiconductor Reliability News, Apr. 1992, 1 page.

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