Method and apparatus to compensate for non-uniform film growth d

Details Method and apparatus to compensate for non-uniform film growth d Method and apparatus to compensate for non-uniform film growth d

1997-12-10

2000-04-18

Pelham, Joseph

Electric heating

Microwave heating

With diverse-type heating

219390, 219411, 2504922, H01L 2120, H05B 302, F27B 504

Patent

active

060518235

ABSTRACT:
An apparatus for heating, according to a predetermined heating profile, a surface carrying a film. The invention includes a source of radiant energy. The source of radiant energy has several peak wavelengths, with each peak wavelength having a unique absorption profile related to the thickness of the film. The source of radiant energy is positioned to direct radiant energy toward the surface. Means are included for holding the source of radiant energy in a manner such that the combination of peak wavelengths produce the desired predetermined heating profile.

REFERENCES:
patent: 3836751 (1974-09-01), Anderson
patent: 4543472 (1985-09-01), Arai et al.
patent: 4680451 (1987-07-01), Gat et al.
patent: 4842686 (1989-06-01), Davis et al.
patent: 5073698 (1991-12-01), Stultz
patent: 5108792 (1992-04-01), Anderson et al.
patent: 5139973 (1992-08-01), Davis et al.
patent: 5179677 (1993-01-01), Anderson et al.
patent: 5336641 (1994-08-01), Fair et al.
patent: 5393564 (1995-02-01), Westmoreland et al.
patent: 5399379 (1995-03-01), Sandhu
patent: 5444217 (1995-08-01), Moore et al.
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5493987 (1996-02-01), McDiarmid et al.
patent: 5504831 (1996-04-01), Sandhu et al.
patent: 5650630 (1997-07-01), Dierks et al.
patent: 5751896 (1998-05-01), Sandhu

Affiliated with

Also associated with

Rating

Method and apparatus to compensate for non-uniform film growth d does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus to compensate for non-uniform film growth d, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus to compensate for non-uniform film growth d will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2337746