Method and apparatus providing air-gap insulation between...

Details Method and apparatus providing air-gap insulation between... Method and apparatus providing air-gap insulation between...

2011-05-31

2011-05-31

Smith, Bradley K (Department: 2894)

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

C257SE23142, C257SE21240

Reexamination Certificate

active

07952174

ABSTRACT:
A semiconductor device and a method of forming it are disclosed in which at least two adjacent conductors have an air-gap insulator between them which is covered by nanoparticles of insulating material being a size which prevent the nanoparticles from substantially entering into the air-gap.

REFERENCES:
patent: 6946382 (2005-09-01), Townsend, III et al.
patent: 7217648 (2007-05-01), Lu et al.
patent: 7256127 (2007-08-01), Gallagher et al.
patent: 7459183 (2008-12-01), Dubois et al.
patent: 7714339 (2010-05-01), Liu
patent: 2008/0308943 (2008-12-01), Kawakita

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