Method and apparatus of uninterrupted slurry supply

Details Method and apparatus of uninterrupted slurry supply Method and apparatus of uninterrupted slurry supply

1998-09-10

1999-11-30

Morgan, Eileen P.

Abrading

Abrading process

Abradant supplying

451446, B24B 100

Patent

active

059932996

ABSTRACT:
A method and an apparatus of uninterrupted slurry supply. A plurality of polishers are provided. A slurry supply system comprises a slurry supply source, a plurality of valve boxes having a corresponding number as the polishers, a plurality of pipes to connect the valve boxes and the slurry supply source and the valve boxes and the polishers, a plurality of bypasses to connect between an inlet and an outlet of each of the valve boxes, and a plurality elbow type manually controlled three-way valve at a plurality of joints of the pipes and the bypasses. A slurry is supplied from the slurry supply source. A flowing direction of the slurry is selected by adjusting the three-way valve to supply the polishers for polishing.

REFERENCES:
patent: 2018119 (1935-10-01), Brouse
patent: 2392213 (1946-10-01), Cruzan
patent: 3683562 (1972-08-01), Day
patent: 4784295 (1988-11-01), Holmstrand
patent: 5467797 (1995-11-01), Seetharaman et al.
patent: 5671911 (1997-09-01), Piscitelli
patent: 5857893 (1999-01-01), Olsen et al.
patent: 5885134 (1999-03-01), Shibata et al.

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