Method and apparatus of surface inspection of a disk

Details Method and apparatus of surface inspection of a disk Method and apparatus of surface inspection of a disk

1998-12-18

2000-01-04

Kim, Robert H.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

356430, 356448, G01N 2100

Patent

active

060116188

ABSTRACT:
An apparatus for inspecting a surface of a disk comprises an indexing table having chucks for holding said disks respectively, said chucks being arranged angularly at regular intervals on the indexing table. Each of disks held by the respective chucks is moved by indexing revolution of the indexing table sequentially from a loading station where the disk is loaded onto the chuck, to an inspection station where the disk is inspected for a surface of the disk and then to an unloading station where the inspected disk is unloaded to the outside of the apparatus. The disk loaded onto a chuck at the loading station is driven to rotate until the disk gets to a predetermined rate of revolution before the disk arrives at the inspection station. The disk which has already get to the predetermined rate of revolution can be immediately inspected for the surface of the disk in the inspection station by an inspection device.

REFERENCES:
patent: 4794264 (1988-12-01), Quackenbos et al.
patent: 4794265 (1988-12-01), Quackenbos et al.
patent: 5389794 (1995-02-01), Allen et al.

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