Method and apparatus of performing probing test for electrically

Details Method and apparatus of performing probing test for electrically Method and apparatus of performing probing test for electrically

1989-02-17

1991-01-15

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, G01R 3102

Patent

active

049856766

ABSTRACT:
This invention relates to a method and apparatus for performing a probing test for sequentially testing chips formed on a semiconductor wafer in a matrix form. An area of a chip subjected to the test or a chip excluded from the test on the wafer is preset, the preset-area information is stored, and only chips subjected to to the test are tested on the basis of the sequentially readout preset-area information.

REFERENCES:
patent: 4590422 (1986-05-01), Milligan
patent: 4677474 (1987-06-01), Sato et al.
patent: 4786867 (1988-11-01), Yamatsu

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