Method and apparatus of measuring carrier distribution

Details Method and apparatus of measuring carrier distribution Method and apparatus of measuring carrier distribution

1982-02-02

1984-09-18

Howell, Janice A.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250341, G01N 2121

Patent

active

044726333

ABSTRACT:
A semiconductor wafer is irradiated with a linearly polarized infrared light beam. On the basis of changes in the polarized state of the light reflected from the wafer, the distribution of the density of carriers depthwise in the wafer is determined. Distribution of the carrier density in the semiconductor wafer can be measured very rapidly in a contactless manner without destroying the wafer.

REFERENCES:
patent: 3426201 (1969-02-01), Hilton et al.
patent: 3623818 (1971-11-01), Gardner et al.
patent: 4030836 (1977-06-01), Smith

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