Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2006-11-03
2011-11-01
Bahta, Kidest (Department: 2122)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C250S442110
Reexamination Certificate
active
08050802
ABSTRACT:
A levitated XY stage with a mechanism to disable the bearing element to allow the physical elements of the stage to come into contact with one another and “Coulomb weld” together, thereby eliminating drift. Preferably, the XY position shift of the stage that results from disabling the bearing is measured, and feed-forward communication to, for example, the AFM scanner is used to enable an offset and remove the error.
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Bahta Kidest
Boyle Fredrickson , S.C.
Bruker Nano, Inc.
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