Method and apparatus measuring edges on a workpiece

Details Method and apparatus measuring edges on a workpiece Method and apparatus measuring edges on a workpiece

1997-10-20

1999-11-09

Kim, Robert H.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1114, G01B 1124

Patent

active

059824913

ABSTRACT:
The invention is directed to a method and an apparatus for measuring the edges 13 of a workpiece 5 with an optical probe 4. The probe 4 measures the distance values (a) between the probe 4 and an adjustable scanning point 15. In the method, the scanning point 15 is moved along a loop path (36a, 36b, . . . , 36n) over the edge 13 of the workpiece 5 to be measured in order to obtain more exact values for measured points of the edge at a higher measuring speed. During the method, distance values (a) are measured by the probe 4 and a point P of the edge 13 is determined from the course of the measured values.

REFERENCES:
patent: 5291270 (1994-03-01), Koch et al.

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