Method and apparatus having a reticle stage safety feature

Details Method and apparatus having a reticle stage safety feature Method and apparatus having a reticle stage safety feature

2007-08-21

2007-08-21

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000

Reexamination Certificate

active

10968405

ABSTRACT:
An apparatus and method are disclosed having a stage reticle safety feature. The apparatus includes a reticle stage and an optical stage. The reticle stage supports a reticle and is capable of moving the reticle in x-y-z directions. The optical stage includes a plurality of components to direct light reflected from the reticle onto a wafer substrate and a safety mechanism to move one or more components of the optical stage away from the reticle stage.

REFERENCES:
patent: 2002/0080339 (2002-06-01), Takahashi
patent: 2005/0134830 (2005-06-01), Van De Ven et al.
International Search Report and Written Opinion of the International Searching Authority for International Application No. PCT/US05/35972, filed Oct. 7, 2005, 8 pp.

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