Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Havin growth from molten state
Reexamination Certificate
2007-10-09
2007-10-09
Hiteshew, Felisa (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Havin growth from molten state
C117S083000
Reexamination Certificate
active
11438575
ABSTRACT:
There is provided a method for growing one or more single crystal ZnO boules within a physical vapor transport furnace system. This method includes the steps of: (a.) placing a source material at a first end of an interior crucible enclosure and placing one or more seed crystals at an opposing second end of the interior crucible enclosure with the seed crystal and the source material separated by a predetermined distance; (b.) heating the crucible, the one or more seed crystals and the source material to predetermined temperatures in such way that the temperature of the source material is higher than the temperature of the seed crystal; (c.) maintaining a pressure within the interior crucible enclosure through flowing a gas mixture; and (d) maintaining a temperature distribution within the crucible enclosure thereby causing a ZnO boule growth on each one of the one or more seed crystals. The ZnO may be doped with desired additional elements. In alternative embodiments, that other boules, both doped and un-doped, such as ZnSe and ZnS may also be formed.
REFERENCES:
patent: 6936101 (2005-08-01), Nause et al.
patent: 2002/0185055 (2002-12-01), Oka
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Nause et al., Pressurized Melt Growth of ZnO Boules, Semiconductor Science Technology, vol. 20, No. 4 (Apr. 2005) at pp. S45-S48.
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Rojo, Crystal Growth of Bulk ZnO by High Temperature Sublimation Methods, 14thInternational Conference on Crystal Growth, Grenoble, France, (Aug. 2004).
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Grasza et al, Contactless CVT Growth of ZnO Crystals, Phys. Stat, Sol. vol. 2, No. 3 (Feb. 2005) at pp. 1115-1118.
Fairfield Crystal Technology, LLC
Hiteshew Felisa
Rosenblatt Gregory S.
Wiggin and Dana LLP
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