Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1995-03-28
1997-05-13
Bennett, G. Bradley
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
374126, G01J 508
Patent
active
056285647
ABSTRACT:
A method and apparatus for optical pyrometry in a Rapid Thermal Processing (RTP) System, whereby the radiation used to heat the object to be processed in the RTP system is in part specularly reflected from specularly reflecting surfaces and is incident on the object with a particular angular distribution, and the thermal radiation from the object is measured at an angles different from the angle where the incident radiation specularly reflected from the surface of the object is a maximum.
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Nenyei Zsolt
Tillmann Andreas
Walk Heinrich
AST Elekronik GmbH
Bennett G. Bradley
Hodgson R. T.
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