Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-12-18
2010-02-09
Nguyen, Kiet T (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S119000
Reexamination Certificate
active
07659529
ABSTRACT:
A method and apparatus is disclosed that may comprise an ultraviolet light source; an optical element within an optical path of the light source mounted on an optical element mount; a vibration damping mechanism operatively connected to the optical element or to the mount which may comprise a wire mesh pad. The optical element may comprise a center wavelength selection optical element, which may comprise a grating, a mirror, or a prism. The vibration damping mechanism may comprise the wire mesh pad comprising an elastic interface between a driving mechanism lever arm operable to move the optical element or the mount and a driving lever arm actuator. The vibration damping mechanism may comprise a mass damping mechanism comprising a mounting plate connected to the optical element or to the mount; a damping mass; the wire mesh pad comprising an elastic interface between the mounting plate and the damping mass.
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Cymer Inc.
Nguyen Kiet T
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