Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2007-12-11
2007-12-11
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C702S150000
Reexamination Certificate
active
10941019
ABSTRACT:
A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. The method may also include determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position; and determining from the temporal intensity of the aerial image information relating to vibration for the aerial image. The relative positions of the slot can be measured as position-related data of the slot pattern.
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Kivits Koen
Kok Haico Victor
Kuiper Hans
Van De Laak Ron
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
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